E-beam writer Raith 150-Two

Description

This equipment makes it possible to react an electrosensitive resin to an electron beam and thus to produce patterns of a dimension less than 10nm.

The Raith 150-Two is also a very powerful automated metrology device thanks to a precise displacement stage (displacement of 150mm with an accuracy of a few nm) coupled with software bridging between drawings in GDS format and measurements.

Manufacturer and model

Raith 150-Two

Technical specifications

Electron beam column and optics:

• Electron source: Schottky field emitter ZrO/W.
• Beam energy range: 100 V to 30 kV in 10 V steps.
• Beam current range: 5 pA – 20 nA.
• Beam size (Gaussian beam):
• 2 nm at 20 kV at 3 mm working distance.
• nm at 1 kV at 3 mm working distance.
• Deflection system with writing field size range: from 0.5 µm up to 2 mm
• Laser interferometer controlled stage (res. 2 nm, repeatability <<50 nm)
• Aperture: 7 to 120 μm
• 20 MHz high speed pattern generation
• Automated height sensing
• Minimum feature size ≤ 20 nm.
• Possibility to pattern areas of up to 4” wafers