Access and Rates
To find out about the different ways of accessing the equipment or for any request for services related to this platform, please contact us.
All equipment listed in alphabetical order
- 3D confocal laser microscope
- AFM Park System NX20
- AFM Veeco
- ALD
- AML Wafer Bonder
- Autoclave
- Automated resin developper
- Biological Safety Cabinet
- Carbolite furnace
- CBE for III-N materials
- CBE for III-V materials
- Centrifuges
- Chemical Mechanical Planarization - CMP
- Contact angle measurement Station
- Contactless conductivity probe
- DC Probe Station
- Dektak profilometer
- DMLM optical microscope
- DUV Flooder
- Disco dicing saw
- E-beam writer Raith 150-Two
- Electrical measurements Station in clean room
- Electrochemical Impedance System (EIS)
- Ellipsometer Alpha-SE
- Ellipsometer Horiba
- Emitech Sputter Coater
- Environmental chamber
- Epifluorescence microscopy
- EQE Station
- Filmetrics
- Flash Tester Station
- Fogale optical profilometer
- FTIR
- Gravity convection oven
- Hall effect Station
- High Frequency Probe Station
- High Power and High Voltage Station
- High Resolution X-ray Diffractometer
- High precision mask aligner Suss MJB4
- High Temperature Probe Station
- HIPLM
- Holographic microscope
- Impedance measuring device
- Inert atmosphere glove box
- Injection in waveguides Station
- IR Laser 980 nm
- IR Laser Q Mark
- Laser femto set-up
- LED characterization Station
- List of electrolithography resins
- List of photolithography resins
- Mask aligner OAI 200
- Mask aligner OAI 806 MBA
- MDP - contactless electrical semiconductor characterization
- Metallurgical optical microscope (Nikon)
- Microcalorimetry Station
- Microscope Zeiss Infinity (optical)
- Microscope Zeiss Leo 1540 XB
- Microscope Zeiss Orion NanoFab
- PECVD (STS and Benchmark)
- Photoplotter
- Phototransducer Station
- Plasma Etcher RIE
- Plasma Etcher Oxford Cobra III-V
- Plasma Etcher Oxford Cobra Metal
- Plasma Etcher Oxford Estralas
- Plasma Etcher STS Advanced Oxide Etch AOE
- Plasma Etcher STS Multiplex Advanced Silicon Etch ASE
- Plasma Etcher STS Multiplex Inductively Coupled Plasma III-V
- Plasmaline
- Plastic injection molding machine
- Plating benches
- Polishing system
- Prime Oven
- Profile projector
- QSPB reader
- Raman spectroscope
- Rapid Thermal Annealing
- Semitool - Rinser Dryer
- Sentrotech furnace
- Solar simulator Station
- Solitec spin coater
- Spectroscopy set-up iHR320
- Spin coater
- Sputter deposition system Edwards
- Sputter deposition system SPT320
- Spray Coater
- Surface Photoluminescence - PL Mapper
- Surface Plasmon Resonance (SPR)
- Tylan furnace
- Ultra cold freezer
- UV Laser 193 nm
- UV Laser 248 nm
- UV-Novascan
- Vacuum coater Edwards
- Vacuum evaporator TLI
- Varian Ion implanter
- Vulcan furnace
- Wet benches
- Wet benches for development