DUV Flooder

Description

Exposition DUV device (distant ultraviolet) without a photolithographic mask alignment system for illumination on all substrates

Manufacturer and model

OAI- Optical Associates Inc.- OAI 2000W UV-Flooder

Technical specifications

• UV light source 2000W with DUV wavelength 250nm
• Substrate max diameter : 4 in

Examples of available processes

• Hybrid process: Step of PMMA resin expositon (electrosensitive resin, but also photosensitive to DUV, not UV) masked by photoresist in a lithographic process combining photolitho and electrolitho for greater efficiency
• Other DUV Exhibition