Sputter deposition system SPT320

Description

Thin layers deposition.

Manufacturer and model

Plasmionique - SPT320

Technical specifications

• 3-magnetron system (available materials: Ag, Al, AlN, Al₂O₃, AlSiCu, Cr, Cu, Hf, HfO₂, In₂O₃, ITO, Mo, Nb, Ni, NiCr, Si, SiO₂, Ta, Ti, TiN, V, W) for making multilayer deposits without having to break the vacuum
• Rotary sample holder

Examples of available processes

• Surface metallizations
• Deposition of metallic multilayers for the production of ohmic contacts on semiconductors and heterostructures