Sputter deposition system Edwards

Description

Thin layers deposition.

Manufacturer and model

Edwards - Auto 500

Technical specifications

• 3-magnetron system (available materials: Al, Cu, Ti, TiN) for making multilayer deposits without having to break the vacuum
• Rotary sample holder

Examples of available processes

• Surface metallizations
• Deposition of metallic multilayers for the production of ohmic contacts on semiconductors and heterostructures