Vacuum coater Edwards

Description

Thin layers deposition.

Manufacturer and model

Edwards - Auto 306

Technical specifications

• Carousel with 4 crucibles (materials available: Al, AlSi, Au, Cr, Ge, Ni, Permalloy, Si, Ti) making it possible to realize multilayer deposits without having to break the vacuum
• Rotary sample holder
• Thickness monitor with 0.1 nm resolution
• Uniformity of the deposit: better than 5% on 3 inches for Al
• Possibility of cleaning the in-situ substrate with argon plasma

Examples of available processes

• Surface metallizations
• Deposition of metallic multilayers for the production of ohmic contacts on semiconductors and heterostructures