Fogale optical profilometer

Description

Low coherence interference surface profilometry.

Manufacturer and model

Fogale Photomap 3D

Technical specifications

• Available microscope lenses: 5x, 20x and 50x
• Vertical resolution of 1nm verified (0.1nm reachable)
• Maximum measurement height of 500 μm.
• Lateral resolution of 1.8 μm, 0.42 μm or 0.17 μm (5x, 20x, 50x)
• Field of view of the camera of 1.2mm x 1mm, 300 μm x 200 μm or 125 μm x 95 μm (5x, 20x, 50x)
• 200 mm tray traveling over 50mm
• Maximum clearance between tray and 200mm microscope lens