Lumonics 193nm UV Laser - PM-846 ArF sn: E040002

Laser UV 193 nm

Description

Research: semiconductor bandgap engineering

Manufacturer & model

Lumonics - PM-846 ArF sn : E040002

Technical specifications

Pulsed laser
Wavelength 193 nm
130mJ/pulse
Class 4
Divergence angle < 1.5 mrad
Beam diameter: 5x5 mm