Polos ADC automatic resin developer

Description

Solid natural polypropylene developing apparatus that enables automated development of photoresists

Manufacturer & model

Polos ADC

Technical specifications

• Substrates with diameters up to 200mm (8in) or square substrates up to 7in x 7in
• Speed ​​range of 0-8000 rpm
• Up to 50 programs, up to 99 steps per program
• Program-controlled valves controlling the injection of nitrogen, water and developers
• Step duration, speed, acceleration, and programmable valve activation

Examples of available processes

• Spraying developers such as MF319 and AZ400K and the possibility of using other types of developers
• Automated development of photoresists including sample rinsing and drying