KLA Tencor P-17 Profilometer

Description

This system allows the measurement of relief, roughness, analysis of thin layers, 2D and 3D step height and stress for scans up to 200 mm without assembly.

This profilometer offers step height repeatability through a superior sensor and scan plate design. It also provides scan flatness across the entire scan length for excellent short, long and strain scan measurements.

It also supports measurements in 2D or 3D, with a variety of filtering, leveling, and analysis algorithms to quantify surface topography. Measurements are fully automated using pattern recognition, sequencing and feature detection.
 

Manufacturer & model

KLA – Tencor P-17

Technical specifications

• Step height: Nanometers to 327 µm
• Low force with constant force control: 0.50 to 50 mg
• Scanning speed: 2 to 25000 µm/s
• Sampling rate: 5 to 2000 Hz
• Scanning the entire sample diameter without assembly
• Video: 5 MP high-resolution color camera
• Arc Correction: Removes error caused by stylus movement
• Software: easy-to-use software interface
• Production capacity: fully automated with sequencing and pattern recognition
   

Examples of available processes

• Step height: 2D and 3D step height
• Texture: roughness and waviness in 2D and 3D
• Shape: arc and shape in 2D and 3D
• Constraint: constraint of thin layers in 2D and 3D
• Examination of defects: topography of the surface of defects in 2D and 3D