Contactless conductivity probe

Description

Contactless electrical conductivity measurements

Manufacturer & Model

Semilab LEI88

Technical specifications

• Non-destructive
• Fast, accurate measurements of sheet conductance / sheet resistance
• Nominal sample thickness range of 450 to 800 microns
• Nominal coil gap (>/= 0.35”/0.899 mm)
• Coil size: 0.56” (14mm)
• Max. Wafer size: 6” (150mm)
• Hi-range: sheet resistance 16 - 3,200 Ω/sq. 

Available processes

Conductivity measurement of wafers or thin layers