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Dominique Drouin

NSERC/IBM Canada Industrial Research Chair in Smarter Microelectronic Packaging for Performance Scaling

Département de génie électrique et de génie informatique,

Faculté de génie

Phone : 62115, poste 62115

Email :

Personal website :

Google Scholar :


Research subjects

Micro and nanofabrication, nanoelectronics, nanomaterials

Research interests

Development of low power consumption nanoelectronic device (transistor manufacturing of Si/SiGe nanowire, carbon nanotubes, thin film of silicon, single-electron), CMOS integration of innovative functions (gas sensors / stress / humidity, metal-oxide resistive memory, low power circuit)


Nanoelectronic devices, Coulomb blockade, non-volatile memory, electron beam lithography, chemical mechanical planarization, plasma etching

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