Dominique Drouin
Professeur, Faculté de génie
FAC. GÉNIE Électrique et informatique
Présentation
Sujet de recherche
Micro et nanoélectronique, Nanomatériaux
Disciplines de recherche
Génie électrique et génie électronique
Mots-clés
Encapsulation microélectronique, Calcul neuromorphique, Apprentissage machine, Capteur pH/gaz sur FDSOI, Lithographie faisceau-électrons, Mémoire non-volatile, Qubit de spin sur Si, Simulation Monte Carlo, Transistor monoélectronique
Langues parlées et écrites
Anglais, Français
Diplômes
(1998). (Postdoctorat, Microscopie électronique). University of Technology, Sydney.
(1998). (Doctorat, Doctorat en génie mécanique). Université de Sherbrooke.
(1994). (Baccalauréat, Baccalauréat en génie électrique). Université de Sherbrooke.
Titres de compétence
Ingénieur.
Prix et distinctions
- (2049) Synergy. Conseil de recherches en sciences naturelles et en génie (CRSNG). (Prix).
- (2009) Prix 2009 MAS K.F.J. Heinrich Award. Microbeam Analysis Society. (Distinction).
Financement
- Subvention. (Obtenu). Cocandidat. Large scale production of high performance infrared imaging sensors - Synergy Award. Conseil de Recherches en Sciences Naturelles et Génie du Canada (CRSNG). Synergy Award. 200 000 $. (2018-2049)
- Subvention. (Obtenu). Cocandidat. Canada-UK Quantum Technologies call: Advanced Manufacturing Toolkit for Quantum Sensing and Quantum Computing. Conseil de Recherches en Sciences Naturelles et Génie du Canada (CRSNG). Nord Quantique. Alliance Canada-UK innitiative. 28 000 $. (2021-2024)
- Subvention. (Obtenu). Cocandidat. Distributed Digital Intelligence Network (D2IN): Development of disruptive andlow-cost microsystems for edge computing. Fondation Canadienne pour l'Innovation (FCI). Ministere de l'education et de l'enseignement supérieur. Canadian Innovation Fund. 6 699 774 $. (2021-2024)
- Subvention. (Obtenu). Candidat principal. Development of novel quantum vacuum-based electronic devices platform and enabling its microfabrication methods. Conseil de Recherches en Sciences Naturelles et Génie du Canada (CRSNG). Infinite Potential Laboratory. Alliance. 769 504 $. (2021-2024)
- Subvention. (Obtenu). Cocandidat. Agrandissement de l’Institut interdisciplinaire d’innovation technologique et achat d’équipements scientifiques pour la Chaine d’Innovation Intégrée. Micro Innovation Collaborative Center (C2MI). Programme de soutien aux organismes de recherche et d’innovation, volet 4. 2 511 000 $. (2021-2024)
- Subvention. (Obtenu). Candidat principal. Enabling large-scale silicon spin qubit platform using memristor-based neuromorphic circuits for quantum dots auto-tuning. Conseil de Recherches en Sciences Naturelles et Génie du Canada (CRSNG). Discovery Grant. 320 000 $. (2019-2024)
- Subvention. (Obtenu). Candidat principal. Hardware implementation of spiking neural networks based on hybrid CMOS-memristors circuits for ultralow-power artificial intelligence at the edge. Fonds de recherche du Québec - Nature et technologies (FRQNT). Projet de recherche en équipe. 199 620 $. (2021-2024)
- Chaire de recherche. (Obtenu). Chercheur principal. NSERC/IBM Industrial Research Chair in High-Performance Heterogeneous Integration. Université de Sherbrooke. Industrial Research Chair. 125 000 $. (2019-2024)
- Subvention. (Obtenu). Collaborateur. QSciTech: Bridging the Gap between Quantum Science and Quantum Technologies - Training the Next Generation of Quantum Scientists, Engineers and Entrepreneurs. Conseil de Recherches en Sciences Naturelles et Génie du Canada (CRSNG). Collaborative Research and Training Experience. 1 650 $. (2018-2024)
- Subvention. (Obtenu). Candidat principal. Advanced interconnects manufacturing toolbox for the Integrated Innovation Chain. Mathematics of Information Technology and Complex Systems (MITACS). Collaborative Microelectronic Innovation Center. Accelerate. 165 000 $. (2021-2022)
- Subvention. (Obtenu). Chercheur principal. Unsupervised spiking neural networks with analog memristive devices for edge computing. Agence nationale de la recherche (ANR) (France). Narodowe Centrum Nauki (Poland). Chist-Era. 322 192 $. (2020-2022)
- Subvention. (Obtenu). Candidat principal. Towards Large-Scale Quantum Systems: Memristor-Based Neuromorphic Circuits for Electronic Regime Recognition & Quantum State Tomography of Silicon Qubits. Institut quantique via CFREF. Call for projects. 237 000 $. (2019-2022)
- Subvention. (Obtenu). Cocandidat. Low Temperature Interconnections for High Performance Heterogeneous Integration. PROMPT-Québec. Collaborative Research and Development Grant. 247 785 $. (2019-2022)
- Subvention. (Obtenu). Cocandidat. Operating support of "Chaine d'innovation intégré pour la prospérité numérique". Ministère de l'économie, de la science et de l'Innovation. Infrastructure support. 1 350 000 $. (2019-2022)
- Subvention. (Obtenu). Candidat principal. Heteregeneous integration of high-densisty analog crossbar for advanced data processing. Conseil de Recherches en Sciences Naturelles et Génie du Canada (CRSNG). Strategic project grant. 577 000 $. (2017-2021)
- Subvention. (Obtenu). Cocandidat. Physical vapour deposition of ferroelectric and multiferroic tunnel junctions. Conseil de Recherches en Sciences Naturelles et Génie du Canada (CRSNG). Strategic parternership grants for projects. 601 000 $. (2017-2021)
- Subvention. (Obtenu). Candidat principal. Neuromorphic Circuits for Large-Scale Quantum Systems. Institut quantique. Call for proposal. 237 000 $. (2019-2021)
- Subvention. (Obtenu). Cocandidat. Chaine d'innovation intégré pour la prospérité numérique. Ministère de l'économie, de la science et de l'Innovation. Infrastructure support. 20 500 000 $. (2018-2021)
- Subvention. (Obtenu). Chercheur principal. Développement de technologie de la microélectronique pour le calcul de haute performance pour des applications centralisées et distribuées. Mathematics of Information Technology and Complex Systems (MITACS). Centre de Collaboration MiQro Innovation. Mitacs Accélération. 550 000 $. (2016-2021)
- Subvention. (Obtenu). Cocandidat. Regroupement Québécois sur les Matériaux de Pointe. (2015-2021)
- Subvention. (Obtenu). Cocandidat. New Initiative for Quantum Information Science and Technology – NIQUIST. (2015-2020)
- Subvention. (Obtenu). Candidat principal. Optical fiber hygrometer system integration. Conseil de Recherches en Sciences Naturelles et Génie du Canada (CRSNG). EGP - Engage Grants for universities. 25 000 $. (2019-2020)
- Subvention. (Terminé). Candidat principal. 3D microscopy fron nanoelectronics devices to integrated systems. Conseil de Recherches en Sciences Naturelles et Génie du Canada (CRSNG). Research Tools and Instruments. 150 000 $. (2018-2020)
- Subvention. (Terminé). Chercheur principal. Design and fabrication of computing and memory node for Exascale super computer. Ministère du développement économique, de l'innovation et de l'exportation (MDEIE). Programme de soutien à la recherche (PSR), volet 4 : Soutien à des initiatives internationales de re. 1 250 000 $. (2016-2020)
- Subvention. (Terminé). Cocandidat. Modélisation et fabrication de qubits de spin extensibles basés sur la technologie UTBB FD-SOI. Fonds de recherche du Québec - Nature et technologies (FRQNT). Projet de recherche en équipe. 180 000 $. (2017-2020)
- Subvention. (Terminé). Cochercheur. Microelectronic platform for scalable quantum computer. Université de Sherbrooke. Canada First - Research excellence fund: From quantum science to quantum engineering. 170 000 $. (2016-2019)
- Subvention. (Terminé). Chercheur principal. Emerging devices integration above CMOS circuit. (2014-2019)
- Subvention. (Terminé). Cocandidat. European Exascale Processor Memory Node Design. (2015-2019)
- Chaire de recherche. (Terminé). Chercheur principal. NSERC/IBM Industrial Research Chair in High-Performance Heterogeneous Integration. (2014-2019)
- Subvention. (Terminé). Cocandidat. Infrared Imager. (2013-2017)
- Chaire de recherche. (Terminé). Chercheur principal. Smarter Microelectronics Packaging for Performance Scaling. (2014-2016)
- Subvention. (Terminé). Chercheur principal. Développement d'un procédé de fabrication pour prototypes de capteur de gaz à nanotubes de carbone. (2015-2016)
- Subvention. (Terminé). Chercheur principal. Complementary Resistance Switching in nano Crossbar Arrays. (2013-2016)
- Subvention. (Terminé). Cocandidat. Imagerie Magnetique à haute sensibilité et haute résolution spatiale utilisant un réseau de spins dans le diamant. (2013-2016)
- Subvention. (Terminé). Cochercheur. NSERC CREATE training program in Integrated Sensor Systems. (2010-2016)
- Subvention. (Terminé). Chercheur principal. 3D heterogeneous platform with highly sensitive integrated gas sensors based on ultra-low power metal SETs circuits. (2014-2015)
- Subvention. (Terminé). Cocandidat. Infrastructure avancée de conception en nano/micro-électronique et mécatronique, et de capture de mouvement haute-fidélité. (2015-2015)
- Subvention. (Terminé). Cocandidat. Institut Interdisciplinaire d'Innovation Technologique. (2012-2015)
- Subvention. (Terminé). Cochercheur. Regroupement Québécois sur les Matériaux de Pointe (RQMP). (2009-2015)
- Subvention. (Terminé). Cocandidat. Infrastructure de Micro et Nanofabrication. (2010-2014)
- Subvention. (Terminé). Chercheur principal. Nanofabrication of single electron devices to support CMOS evolution in next decades.. (2009-2014)
- Contrat. (Terminé). Chercheur principal. Study/Improvement of IBM Semi-conductor Packaging Interconnection Process Robustness for large chips. (2011-2013)
- Subvention. (Terminé). Chercheur principal. Packaging single electron device integrated on CMOS technology. (2011-2013)
- Subvention. (Terminé). Cochercheur. Gallium nitride processes for efficient low loss power transistors. (2010-2013)
- Subvention. (Terminé). Chercheur principal. Nanofabrication of single electron devices to support CMOS evolution in next decades. (2010-2013)
- Subvention. (Terminé). Cochercheur. Single Electron Device Integration on CMOS technology. (2010-2013)
- Subvention. (Terminé). Cocandidat. Mapping Anti-Cancer Drugs Using Advances X-ray Microanalysis. (2011-2012)
- Subvention. (Terminé). Chercheur principal. Single Electron Device Integration on CMOS Technology. (2009-2012)
- Subvention. (Terminé). Cocandidat. Centre d'excellence en génie de l'information (CEGI). (2009-2012)
- Subvention. (Terminé). Cochercheur. Three dimensional aberration corrected scanning transmission electron microscopy. (2008-2011)
- Subvention. (Terminé). Chercheur principal. An advanced planarization tool for nanodamascene process enabling nanoelectronic circuits. (2009-2010)
- Subvention. (Terminé). Chercheur principal. Réalisation d'une mémoire non-volatile basée sur un piège à électron. (2007-2010)
- Subvention. (Terminé). Chercheur principal. Fabrication of non-volatile memory based on single electron trap. (2008-2010)
Publications
Articles de revue
- Raphaël Dawant, Robyn Seils, Serge Ecoffey, Rainer Schmid, Dominique Drouin. (2022). Hybrid cross correlation and line-scan alignment strategy for CMOS chips electron-beam lithography processing. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 40 (1), 012601. DOI. (Article publié).
- Abderrahim El Amrani, Étienne Paradis, David Danovitch, Dominique Drouin. (2021). A Novel Chip-join Assembly Using Heterogeneous Sn-Ag Bumps. IEEE Transactions on Components, Packaging and Manufacturing Technology (Article publié).
- Yoandris González, Azza Hadj Youssef, Andreas Dörfler, Rajesh Katoch, Abdelouadoud El Mesoudy, Andranik Sarkissian, Dominique Drouin, Andreas Ruediger. (2021). Competing tunneling conduction mechanisms in oxygen deficient HF0.5Zr0.5O2. Applied Physics Letters 119 (13), 132906. DOI. (Article publié).
- Romain Stricher, Paul Gond-Charton, Amrid Amnache, Jose Francisco Ambia Campos, Luc Frechette, Dominique Drouin, Serge Ecoffey. (2021). In Situ Doped Polysilicon (ISDP) Hydrophilic Direct Wafer Bonding for MEMS Applications. ECS Journal of Solid State Science and Technology DOI. (Article publié).
- Blonkowski S, Labalette M, Jeannot S, Ecoffey S, Souifi A, Drouin D. (2021). Modeling current and voltage peaks generation in complementary resistive switching devices. Solid-State Electronics (183), 108122. (Article publié).
- João H Quintino Palhares, Yann Beilliard, Fabien Alibart, Everton Bonturim, Daniel Z de Florio, Fabio C Fonseca, Dominique Drouin, Andre S Ferlauto. (2021). Oxygen vacancy engineering of TaO x-based resistive memories by Zr doping for improved variability and synaptic behavior. Nanotechnology 32 (40), 405202. DOI. (Article publié).
- Youcef A Bioud, Etienne Paradis, Abderraouf Boucherif, Dominique Drouin, Richard Arès. (2021). Shape control of cathodized germanium oxide nanoparticles. Electrochemistry Communications 122 106906. (Article publié).
- Tony Liu, Amirali Amirsoleimani, Fabien Alibart, Serge Ecoffey, Dominique Drouin, Roman Geno. (2020). AIDX: Adaptive Inference Scheme to MitigateState-Drift in Memristive VMM Accelerators. IEEE Transactions on Circuits and Systems II: Express Briefs (Article publié).
- A El Amrani, É Paradis, D Danovitch, D Drouin. (2020). A Study of Low-Cost Sequential Electroplating Bumping Process and Its Metallurgical Behavior. IEEE Transactions on Components, Packaging and Manufacturing Technology 10 (5), 917-923. (Article publié).
- M Merhej, S Ecoffey, B Sadani, B Lee–Sang, T Baron, S David, D Drouin, B Salem. (2020). A fabrication process for self-connected horizontal SiGe nanowires. Microelectronic Engineering 220 111150. (Article publié).
- Youcef Ataellah Bioud, Abderraouf Boucherif, Gilles Patriarche, Dominique Drouin, Richard Arès. (2020). Capturing the Effects of Free Surfaces on Threading Dislocation Density Reduction. ECS Transactions (Article publié).
- Yann Beilliard, François Paquette, Frédéric Brousseau, Serge Ecoffey, Fabien Alibart, Dominique Drouin. (2020). Conductive filament evolution dynamics revealed by cryogenic (1.5 K) multilevel switching of CMOS-compatible Al2O3/TiO2 resistive memories. Nanotechnology (Article publié).
- Youcef A Bioud, Maxime Rondeau, Abderraouf Boucherif, Gilles Patriarche, Dominique Drouin, Richard Arès. (2020). Effect of sintering germanium epilayers on dislocation dynamics: From theory to experimental observation. Acta Materialia (Article publié).
- A Amirsoleimani, F Alibart, V Yon, J Xu, M. R Pazhouhandeh, S Ecoffey, Y Beilliard, R Genov, D Drouin. (2020). In‐Memory Vector‐Matrix Multiplication in MonolithicComplementary Metal–Oxide–Semiconductor‐Memristor Integrated Circuits: DesignChoices, Challenges, and Perspectives. Advanced Intelligent Systems (Article publié).
- Yann Beilliard, François Paquette, Frédéric Brousseau, Serge Ecoffey, Fabien Alibart, Dominique Drouin. (2020). xInvestigation of resistive switching and transport mechanisms of Al2O3/TiO2− memristors under cryogenic conditions (1.5 K). AIP Advances 10 (2), 025305. (Article publié).
- A Quelennec, É Duchesne, H Frémont, D Drouin. (2019). Source Separation Using Sensor’s Frequency Response:Theory and Practice on Carbon Nanotubes Sensors. Sensors 19 (15), 3389. (Article publié).
- YA Bioud, A Boucherif, M Myronov, A Soltani, G Patriarche, N Braidy, D Drouin, R Arès. (2019). Uprooting defects to enable high-performance III-Vdevices on Si. Nature Communication 10 (1), 1-12. (Article publié).
- Youcef Ataellah Bioud, Abderraouf Boucherif, Maksym Myronov, Gilles Patriarche, Dominique Drouin, Richard Arès. (2019). Voided Ge/Si Platform to Integrate III-V Materials on Si. ECS Transactions 93 (1), 81. (Article publié).
- Tetsi* E, Philippot G, Bord Majek I, Aymonier C, Audet J, Lemire R, Bechou L, Drouin D. (2018). Ba0.6Sr0.4TiO3 Thin Films Deposited by Spray Coating for High Capacitance Density Capacitors. Physica Status Solidi (A) Application and Materials Science (Article publié).
- P Galy, P Lemieux*, J Camirand Lemyre, F Arnaud, D. Drouin and M Pioro-Ladrière. (2018). Cryogenic temperature characterization of a 28 nmFD-SOI dedicated structure for advanced CMOS and quantum technologiesco-integration. Journal of the Electron Devices Society (Article publié).
- C Bonafos, G Benassayag, R Cours, B Pécassou*, PV Guenery*, N Baboux, L Militaru, A Souifi, E Cossec, K Hamga*, S Ecoffey, D Drouin. (2018). Ion beam synthesis of indium-oxide nanocrystals forimprovement of oxide resistive random-access memories. Materials Research Express 5 (1), 015005. (Article publié).
- MN Beattie, YA Bioud*, DG Hobson, A Boucherif, CE Valdivia, D Drouin, R Ares, K Hinzer. (2018). Tunable conductivity in mesoporous germanium. Nanotechnology 29 (21), 215701. (Article publié).
- Tesega Ayele G*, Monfray S, Ecoffey S, Boeuf F, Cloarec JP, Drouin D, Souifi A. (2018). Ultrahigh sensitive CMOS pH sensor developped in the BEOL of Standard 28 nm UTBB FDSOI. Journal of the Electron Devices Society 6 (1), 1026-1032. (Article publié).
- D. Drouin, G. Droulers*, M. Labalette*, B. Lee Sang*, P. Harvey-Collard*, A. Souifi, S. Jeannot, S. Monfray, M. Pioro-Ladriere, and S. Ecoffey. (2017). Journal of Nanomaterials 2017 (8613571), (Article publié).
- M Merhej*, T Honegger, F Bassani, T Baron, D Peyrade, D Drouin, B Salem. (2017). Direct measurement of AC electrokinetics propertiesand capture frequencies of silicon and SiGe nanowires. Semiconductor Science and Technology 33 (1), 015005. (Article publié).
- M Labalette*, S Jeannot, S Blonkowski, S Ecoffey, A Souifi, D Drouin. (2017). Fabrication of planar back end of line compatible HfOx Complementary Resistive Switches. IEEE Transaction on Nanotechogy DOI. (Article publié).
- Merhej*, Mouawad and Drouin, Dominique and Salem, Bassem and Baron, Thierry and Ecoffey, Serge. (2017). Fabrication of top-down gold nanostructures using a damascene process. Microelectronic Engineering 177 41-45. (Article publié).
- Bioud*, Youcef A and Boucherif, Abderraouf and Belarouci, Ali and Paradis, Etienne and Fafard, Simon and Aimez, Vincent and Drouin, Dominique and Ares, Richard. (2017). Fast growth synthesis of mesoporous germanium films by high frequency bipolar electrochemical etching. Electrochimica Acta 232 422--430. (Article publié).
- Rahhal, Lama and Ayele, Getenet Tesega* and Monfray, Stephane and Cloarec, Jean-Pierre and Fornacciari, Benjamin and Pardoux, Eric and Chevalier, Celine and Eccofey, Serge and Drouin, Dominique and Morin, Pierre and others. (2017). High Sensitivity pH Sensing on the BEOL of Industrial FDSOI Transistors. Solid-State Electronics (Article publié).
- G Droulers*, S Ecoffey, M Pioro-Ladrière, D Drouin,. (2017). Metallic Single Electron Transistors: Impact of Parasitic Capacitances on Small Circuits. IEEE Trans. on Electron Devices 64 (12), 5202-5208. (Article publié).
- Y. A. Bioud*, A. Boucherif, A. Belarouci, E. Paradis, D. Drouin, R.Ares. (2016). Chemical composition of nanoporous layer formed by electrochemical etching of p-typeGaAs. Nanoscale Research Letters 11 446. (Article publié).
- S Chatbouri, M Troudi, N Sghaier, V Aimez, D Drouin and A Souifi,. (2016). Direct exchange between silicon nanocrystals and tunnel oxide traps under illumination on single electron photodetector. Semiconductors 50 (Article publié).
- Yosri Ayadi*, Lama Rahhal, Bertrand Vilquin, Céline Chevalier, Fabian Ambriz Vargas, Serge Ecoffey, Andreas Ruediger, Andranik Sarkissian, Stéphane Monfray, Jean-Pierre Cloarec, Dominique Drouin , Abdelkader Souifi. (2016). Novel concept of gas sensitivity characterization of materials suited for implementationin FET-based gas sensors. Nanoscale Research Letters 11 (1), 446. (Article publié).
- Bruno Lee Sang*, Marie-Josée Gour, Maxime Darnon, Serge Ecoffey, Abdelatif Jaouad, Benattou Sadani*, Dominique Drouin. (2016). Selective dry etching of TiN nanostructures over SiO2 nanotrenches using a Cl2/Ar/N2 inductively coupled plasma. Journal of Vacuum Science and Technology (JVST) (Article publié).
- KG. El Hajjam*, MA Bounouar*, N Baboux, S Ecoffey, M Guilmain, E Puyoo, LA Francis, A Souifi, D Drouin, F Calmon. (2016). Tunnel junction engineering for optimized Metallic Single Electron Transistor. IEEE Transactions on Electron Devices (Article publié).
- Sang*, Bruno Lee and Gour, Marie-Josee and Jaouad, Abdelatif and Ecoffey, Serge and Darnon, Maxime and Sadani*, Benattou and Souifi, Abdelkader and Drouin, Dominique. (2015). Inductively coupled plasma etching of ultra-shallow Si 3 N 4 nanostructures using SF6/C4F8 chemistry. Microelectronic Engineering 141 68-71. (Article publié).
- Mahvash, Farzaneh and Paradis, Etienne and Drouin, Dominique and Szkopek, Thomas and Siaj, Mohamed. (2015). Space-charge limited transport in large-area monolayer hexagonal boron nitride. Nano letters 15 (4), 2263--2268. (Article publié).
- Diop*, Mamadou Diobet and Paquet, Marie-Claude and Danovitch, David and Drouin, Dominique. (2015). Void-Free Underfill Process With Variable Frequency Microwave for Higher Throughput in Large Flip Chip Package Application. IEEE Transactions on Device and Materials Reliability, 15 (2), 250-257. (Article publié).
- P Harvey-Collard*, D Drouin, M Pioro-Ladrière. (2014). A Silicon Nanocrystal Field Effect Transistor. Applied Physic Letter 104 (19), 193505. (Article publié).
- El Hajjam*, Khalil and Baboux, Nicolas and Calmon, Francis and Souifi, Abdelkader and Poncelet, Olivier and Francis, Laurent A and Ecoffey, Serge and Drouin, Dominique. (2014). Highly transparent low capacitance plasma enhanced atomic layer deposition Al2O3-HfO2 tunnel junction engineering. Journal of Vacuum Science \& Technology A 32 (1), 01A132. (Article publié).
- Parekh*, Rutu and Beauvais, Jacques and Drouin, Dominique. (2014). SET logic driving capability and its enhancement in 3-D integrated SET--CMOS circuit. Microelectronics Journal 45 (8), 1087--1092. (Article publié).
- Chatbouri, S and Troudi, M and Sghaier, N and Aimez, V and Drouin, D and Souifi, A. (2014). Traps contribution on detection time of single electron photodetector (Photo-SET). Semiconductor Science and Technology 29 (8), 085003. (Article publié).
- *Guilmain M , *Labbaye T , *Dellenbach F , *Nauenheim C , Drouin D , Ecoffey S. (2013). A damascene platform for controlled ultra-thin nanowire fabrication. Nanotechnology 24 (24), (Article publié).
- Gerbedoen JC, Aliane* A, Giguère A, Drouin D, Aimez V. (2013). All evaporation submicron lift-off lithography process with negative e-beam QSR-5 resist. Microelectronic Engineering 103 123-125. (Article publié).
- Bilousov OV, Geaney H, Carvajal JJ, Zubialevich VZ, Parbrook PJ, Giguere A, Drouin D, Diaz F, Aguilo M, O'Dwyer C. (2013). Fabrication of p-type porous GaN on silicon and epitaxial GaN. Applied Physics Letters 103 (11), 112103-112103-5. (Article publié).
- *Harvey-Collard P, Jaouad A, Drouin D, Pioro-Ladrière M. (2013). Inductively coupled plasma etching of amorphous silicon nanostructures over nanotopography using C4F8/SF6 chemistry. Microelectronic Engineering 110 408-413. (Article publié).
- Bilousov OV, Carvajal JJ, Drouin D, Vilalta A, Ruterana P, Pujol MC, Mateos X, Díaz F, Aguiló M, O'Dwyer C. (2013). Metal catalyzed porous n-type GaN layers: low resistivity ohmic contacting and single-step MgO/GaN diode formation. ECS Transactions 53 (2), 12-27. (Article publié).
- Roy-Guay D, Pioro-Ladrière M, Morris D, Tallaire A, Achard J, Drouin D. (2012). CL and photoluminescence of NV centers. International Journal of Nanoscience 11 (4), (Article publié).
- Carvajal JJ , Bilousov OV , Drouin D , Aguiló M , Díaz F , Rojo JC. (2012). Chemical vapor deposition of porous GaN particles on silicon. Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada 18 (4), (Article publié).
- Méndez M , Cesteros Y , Marsal LF , Giguère A , Drouin D , Salagre P , Formentín P , Pallarès J , Aguiló M , Díaz F , Carvajal JJ. (2012). Effect of thermal annealing on the kinetics of rehydroxylation of Eu3+:La2O3 nanocrystals. Inorganic chemistry 51 (11), (Article publié).
- Solanki A, Gentile P, Calvo V, Rosaz G, Salem B, Aimez V, Drouin D, Pauc N. (2012). Geometrical control of photocurrent in active Si nanowire devices. Nano Energy 1 (5), 714-722. (Article publié).
- *Jouvet N, *Bounouar MA, *Ecoffey S, *Nauenheim C, Beaumont A, Souifi A, Calmon F, Monfray S, Ruediger A, Drouin D. (2012). Recent developments on 3d integration of metallic set onto CMOS process for memory application. International Journal of Nanoscience 11 (4), (Article publié).
- Bilousov OV , Carvajal JJ , Drouin D , Mateos X , Díaz F , Aguiló M , O'Dwyer C. (2012). Reduced workfunction intermetallic seed layers allow growth of porous n-GaN and low resistivity, ohmic electron transport. ACS applied materials & interfaces 4 (12), (Article publié).
- *Parekh R, Beaumont A, Beauvais J, Drouin D. (2012). Simulation and Design Methodology for SET/SET-CMOS Hybrid Integrated Logic at 22-nm Room Temperature Operation. IEEE Transaction on electron device 59 (4), 918-923. (Article publié).
- Xuan W, Beaumont A, *Guilmain M, *Bounouar MA, Baboux N, Drouin D, Calmon F. (2012). Static and Dynamic Models for Single Electron Memory. IEEE Transactions on Electron Devices 59 (1), 212-220. (Article publié).
- *Demers H , Ramachandra R , Drouin D , de Jonge N. (2012). The probe profile and lateral resolution of scanning transmission electron microscopy of thick specimens. Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada 18 (3), (Article publié).
- *Demers H , *Poirier-Demers N , Phillips MR , de Jonge N , Drouin D. (2012). Three-dimensional electron energy deposition modeling of cathodoluminescence emission near threading dislocations in GaN and electron-beam lithography exposure parameters for a PMMA resist. Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada 18 (6), (Article publié).
- *Guilmain M, Jaouad A, *Ecoffey S, Drouin D. (2011). SiO2 shallow nanostructures ICP etching using ZEP electroresist. Microelectronic Engineering 88 (8), 2505-2508. (Article publié).
- *Ayari-Kanoun A, Jaouad A, Souifi A, Drouin D, Beauvais J. (2011). Silicon nitride nanotemplate fabrication using inductively coupled plasma etching process. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 29 (5), (Article publié).
- *Droulers G, Beaumont A, Beauvais J, Drouin D. (2011). Spectroscopic ellipsometry on thin titanium oxide layers grown on titanium by plasma oxidation. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 29 (2), (Article publié).
- *Ecoffey S, *Guilmain M, Morissette JF, *Bourque F, *Pont J, *Lee Sang N, Drouin D. (2011). Technology platform for the fabrication of titanium nanostructures. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 29 (6), (Article publié).
- *Demers H , *Poirier-Demers N , *Couture AR , *Joly D , *Guilmain M , de Jonge N , Drouin D. (2011). Three-dimensional electron microscopy simulation with the CASINO Monte Carlo software. Scanning 33 (3), (Article publié).
- *Beaumont A, *Dubuc C, Beauvais J, Drouin D. (2010). Direct-write electron beam lithography in silicon dioxide at low energy. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 28 (5), 940-945. (Article publié).
- de Jonge N , *Poirier-Demers N , *Demers H , Peckys DB , Drouin D. (2010). Nanometer-resolution electron microscopy through micrometers-thick water layers. Ultramicroscopy 110 (9), (Article publié).
- M. Mendez, J. J. Carvajal, Y. Cesteros, L. F. Marsal, E. Martínez-Ferrero, A. Giguere, D. Drouin, P. Salagre, P. Formentín, J. Pallarès, M. Aguiló and F. Díaza. (2010). Photoluminescence and cathodoluminescence of Eu: La2O3 nanoparticles synthesized by several methods. Physics Procedia 8 114-120. (Article publié).
- *Demers H , *Poirier-Demers N , Drouin D , de Jonge N. (2010). Simulating STEM imaging of nanoparticles in micrometers-thick substrates. Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada 16 (6), (Article publié).
- Méndez M, Carvajal JJ, Cesteros Y, Aguiló M, Díaz F, Giguère A, Drouin D, Martínez-Ferrero E, Salagre P, Formentín P, Pallarès J, Marsal LF. (2010). Sol-gel Pechini synthesis and optical spectroscopy of nanocrystaline La2O3 doped with Eu3+. Optical Materials 32 (10), 1686-1692. (Article publié).
- *Dupuy E, Morris D, Pauc N, Aimez V, Gendry M, Drouin D. (2009). Carrier transport properties in the vicinity of single self-assembled quantum dots determined by low-voltage cathodoluminescence imaging. Applied Physic Letter 94 022113. (Article publié).
- *Ayari-Kanoun A, Drouin D, Beauvais J, Lysenko V, Nychyporuk T, Souifi A. (2009). Organization of silicon nanocrystals by localised electro-chemical etching. Applied Physic Letter 95 153105. (Article publié).
- *Beaumont A, *Dubuc C, Beauvais J, Drouin D. (2009). Room temperature single electron transistor featuring gate enhanced on-state current, Electron Device Letters. IEEE Electron Device Letters 30 766-768. (Article publié).
- *Dubuc C, Beauvais J, Drouin D. (2008). A nanodamascene process for advanced single-electron transistor fabrication. IEEE Transactions on Nanotechnology 7 68-73. (Article publié).
- *Dubuc C, *Beaumont A, Beauvais J, Drouin D. (2008). Current conduction models in high temperature single-electron transistor. Solid-State Electronic 53 478-482. (Article publié).
- Shaffer E, Helmy A, Drouin D, Dubowski D. (2008). Excimer laser-induced crystallization of CdSe thin films. Applied Physics A: Materials Science and Processing 93 866-874. (Article publié).
- Drouin D , *Couture AR , *Joly D , *Tastet X , Aimez V , Gauvin R. (2007). CASINO V2.42: a fast and easy-to-use modeling tool for scanning electron microscopy and microanalysis users. Scanning 29 (3), (Article publié).
- *Dubuc C, Beauvais J, Drouin D. (2007). Single-electron transistors with wide operating temperature range. Applied Physic Letter 90 113104. (Article publié).
- Genest J, Dubowski JJ, Aimez V, *Pauc N, Drouin D, Post M. (2007). UV laser controlled quantum well intermixing in InAlGaAs/GaAs heterostructures. Journal of Physics: Conference Series 59 605-609. (Article publié).
- Mun LK , Drouin D , Lavallée E , Beauvais J. (2004). The impact of charging on low-energy electron beam lithography. Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada 10 (6), (Article publié).
Chapitres de livre
- Amirali Amirsoleimani, Tony Liu, Fabien Alibart, Serge Eccofey, Yao-Feng Chang, Dominique Drouin, Roman Genov. (2021). Mitigating State-Drift in Memristor Crossbar Arrays for Vector Matrix Multiplication. Memristor - An Emerging Device for Post-Moore’s Computing and Applications (IntechOpen). DOI. (Article publié).
Articles de conférence
- Benoit Manchon, Greta Segantini, Pedro Rojo Romeo, Nicolas Baboux, Rabei Barhoumi, F Alibart, Bertrand Vilquin, Dominique Drouin, D Deleruyelle. (2021). Electrical Characterisation of HfZrO2 Ferroelectric Tunnel Junctions for Neuromorphic Application. EMRS 2021 Fall Meeting.
- Youcef A Bioud, Abderraouf Boucherif, Gilles Patriarche, Dominique Drouin, Richard Arès. (2020). Engineering dislocations and nanovoids for high-efficiency III–V photovoltaic cells on silicon. AIP Publishing LLC, (Article publié).
- P.-Y. Martinez, Y. Beilliard, M. Godard, D. Danovitch, D. Drouin, J. Charbonnier, P. Coudrain, A. Garnier, D. Lattard, P. Vivet, S. Cheramy, E. Guthmuller, C. Fuguet Tortolero, V. Mengue, J. Durupt, A. Philippe, D. Dutoit. (2020). ExaNoDe: combined integration of chiplets on activeinterposer with bare dice in a multi-chip-module for heterogeneous and scalablehigh performance compute nodes. VLSI. (Article accepté).
- A El Amrani, E Paradis, D Danovitch, D Drouin. (2020). Heterogenous Bump Metallurgy Through a Sequential Plating Based Process. IEEE, (Article publié).
- A El Amrani, E. Paradis, D. Danovitch, D. Drouin. (2020). High Aspect Ratio Heterogenous Sn-Ag Bump Structureusing a Sequential Electroplating Process and Novel Barrier. IEEE Xplore, (Article publié).
- Michele Calvo, Guillaume Beaudin, Laurence Mercier-Coderre, Pauline Girault, Pedro Rojo-Romeo, Regis Orobtchouk, Romain Stricher, Stephane Monfray, Serge Ecoffey, Dominique Drouin, Frederic Boeuf, Michael Canva, Paul G Charette. (2020). Improving silicon nitride ring resonator performances on 300 mm industrial environment for point of care applications. International Society for Optics and Photonics, 1136105. (Article publié).
- Quentin Vandier, Julien Pezard, Hélène Fremont, Éric Duchesne, Dominique Drouin. (2020). Readout Circuit Implemented on PCB-Level for Embedded CNT Sensors. IEEE Xplore, (Article publié).
- Beilliard Y, Martinez PY, Philippe A, Vivet P, Drouin D. (2019). 3D-IC design solution for modular integration of chiplet over silicon interposer. European Network on High Performance and Embedded Architecture and Compilation HiPEAC 2019. (Article publié).
- I. Kriekouki, S. Rochette, C. Rohrbacher, J. Camirand Lemyre, M. Pioro-Ladrière, D. Drouin, M. Barragan, S. Mir, P. Galy. (2019). 28 nm UTBB FD-SOI technology for Silicon-based quantum dots and Cryo-CMOS electronics. Silicon Quantum Electronics Workshop. (Article publié).
- A El Amrani, E. Paradis, D. Danovitch, D. Drouin,. (2019). Ag Diffusion Control Through Sn on aSequential Plating-Based Bumping Process. IEEE Xplore, (Article publié).
- YA Bioud, MN Beattie, A Boucherif, M Jellit, R Stricher, S Ecoffey, G Patriarche, D Troadec, A Soltani, N Braidy, M Wilkins, C E Valdivia, K Hinzer, D Drouin, R Arès. (2019). A porous Ge/Si interface layer for defect-free III-Vmulti-junction solar cells on silicon”, , 10913, Fev 2019. PROCEEDINGS OF SPIE, (Article publié).
- Y Beilliard, F Paquette, F Brousseau, S Ecoffey, F Alibart, D Drouin. (2019). Evidence of Normal-Isolant-Superconducting TunnelJunction in TiN/TiO2/Pt Memristors,Oct 2019. Silicon Quantum Electronics Workshop. (Article publié).
- YA Bioud, A Boucherif, M Jellit, A Soltani, GJ Patriarche, D Drouin, R Ares. (2019). Ge/Si Virtual Substratefor III-V multi-junction solar cells. PROCEEDINGS OF SPIE, (Article publié).
- C Rohrbacher, S Rochette, RH Foote, A Bédard-Vallée, P Galy, F. Arnaud, T. Bedecarrats, D Drouin, M Pioro-Ladrière. (2019). High-resolution cryogenic capacitance measurements of FD-SOI structures using a capacitance bridge. Silicon Quantum Electronics Workshop. (Article publié).
- J Moussodji, O Chacon, F Santerre, D Drouin,. (2019). Laser Grooving of multi stack materialModeling: Implementation of a high accuracy tool for laser-grooving and dicingapplication. International Society for Optics and Photonics, (Article publié).
- J Moussodji, O Chacon, F Santerre, D Drouin,. (2019). Multi-physics modelling and ExperimentalInvestigation – An original approach for Laser-dicing/grooving processoptimization. IEEE Xplore, (Article publié).
- Y Beilliard, F Paquette, F Brousseau, S Ecoffey, F Alibart, D Drouin. (2019). Observation of Highly Nonlinear Resistive Switching of TiO2-basedMemristors at Ultra-low Temperature (1.5 K). IEEE Xplore, (Article publié).
- A Elshear, R Stricher, S Ecoffey, M Darnon, D Drouin,. (2019). Patterning Platinum using BEOL industrially compatible processes; Chemical Mechanical Polishing vs. ICP Plasma etching, , Sept 2019. 44th International Conference on Micro and Nanoengineering. (Article publié).
- R Stricher, A Elshear, D Drouin, S Ecoffey. (2019). Pt and Au Planarization for the Fabrication of Micro- and Nano-Structures. 23rd International Symposium On CMP. (Article publié).
- I Kriekouki, J Camirand Lemyre, Sophie Rochette, Claude Rohrbacher, D Drouin, Manuel J Barragan, Salvador Mir, Philippe Galy, M Pioro-Ladrière. (2019). UTBB FD-SOI Technology for Silicon-based Quantum Dots and Cryo-CMOS Electronics. Silicon Quantum Electronics Workshop (SIQEW 2019). (Article publié).
- C Rohrbacher, S Rochette, J Camirand Lemyre, A Bédard-Vallée, P Lemieux, P Galy, T Bedecarrats, F Arnaud, D Drouin, M Pioro-Ladriere. (2019). Ultra-thin body buriedoxide 28nm FD-SOI platform for silicon quantum dots. Bulletin of the American Physical Society. (Article publié).
- V Lafage*, Y Beilliard, A Sridhar, T Brunschwiler, D Drouin. (2018). 2D magnetic inductors for DC-DC converters on glass interposer. IEEE Explore, (Article publié).
- Beilliard Y*, Martinez PY, Philippe A, Vivet P, Drouin D. (2018). 3D-IC design solution for modular integration of chiplet over silicon interposer. European Network on High Performance and Embedded Architecture and Compilation HiPEAC. (Article publié).
- YA Bioud*, A Boucherif, E Paradis, A Soltani, D Drouin and R. Arès,. (2018). Defect-free,hetero-epitaxy through electrochemical etching of germanium for multijunctionsolar cells applications. The 11th Porous Semiconductors - Science and Technology. (Article publié).
- V Lafage*, Y Beilliard, A Sridhar, T Brunschwiler, D Drouin. (2018). Fabrication of 2D and 3D inductors for DC-DC converters integrated on glass interposer. IEEE Explore, 1-8. (Article publié).
- E. Tetsi*, I. Bord Majek, G. Philippot, C. Aymonier, R. Lemire, J. Audet, L. Béchou, D Drouin. (2018). Fabrication of high capacitance density capacitor using spray coated Ba0.6Sr0.4TiO3 thin films. IEEE Explore, (Article publié).
- YA Bioud*, A Boucherif, M Myronov, A Soltani, G Patriarche, N Braidy, D Drouin, R Arès. (2018). High-quality Ge/Si virtual substrates fabricated by a low cost and scalable process. The 9th International SiGe Technology and Device Meeting (ISTDM) and the 11th International Conference on Silicon Epitaxy and Heterostructures (ICSI). (Article publié).
- Getenet-Tesega A*, Monfray S, Boeuf F, Cloarec JP, Ecoffey S, Drouin D, Souifi A. (2018). Highly Performant Integrated pH-Sensor Using the Gate Protection Diode in the BEOL of Industrial FDSOI. 2018 IEEE International Electron Devices Meeting. (Article accepté).
- A. El Amrani*, E. Paradis, D. Danovitch, D. Drouin. (2018). Investigation of a Low-Cost Sequential Plating Based Process for Pb-free Bumping. 6th Electronics System-Integration Technology Conference. (Article publié).
- Bioud* Y A, Boucherif A, Paradis E, Soltani A, Drouin D, Arès R. (2018). Low cost Ge/Si virtual substrate through dislocation trapping by nanovoids. arXiv, (Article publié).
- C Valdivia, MN Beattie, YA Bioud*, DG Hobson, A Boucherif, D Drouin, R Arès, K Hinzer. (2018). Mesoporous Germanium for High Efficiency Photovoltaic Cells. The 42nd International Conference & Exposition on Advanced Ceramics & Composites (ICACC). (Article publié).
- MN Beattie, YA Bioud*, A Boucherif, D Drouin, R Arès, CE Valdivia, K Hinzer. (2018). Multi-Junction Solar Cells on Si Substrates with a Voided Ge Interface Layer: Effect of Substrate Doping on Simulated CellPerformance. The 7th edition of the World Conference on Photovoltaic Energy Conversion (WCPEC-7): the 45th IEEE PVSC, the 28th PVSEC and the 34th EU PVSEC. (Article publié).
- M Godard*, M Darnon, S Martel, C Fortin, D Drouin. (2018). Plasma treatment for fluxless flip-chip chip-joining process. IEEE Explore, (Article publié).
- A Quelennec*, Y Ayadi, Q Vendier, E Duchesne, H Frémont, D Drouin. (2018). Smart Packaging –Microscopic temperature and moisture sensors embedded in a flip-chip package. IEEE Explore, (Article publié).
- E. Tetsi*, G. Philippot, I. Bord Majeka, C. Aymonier, J. Audet, R. Lemire, L. Béchou, D. Drouin. (2018). Spray coating of Ba(Sr)TiO3 nanoparticles: a low?cost and scalable process for thin dielectric films. Micro Nano Engineering. (Article publié).
- A Maalaoui*, M Frenea-Robin, J Genest, S Ecoffey, J Beauvais, P Charette, D Drouin, JP Cloarec. (2018). Towards miniaturized pH sensor based on carbon nanotubes assembled by DEP on titanium electrodes. IEEE International Conference on Industrial Technology. (Article publié).
- GT Ayele*, S Monfray, S Ecoffey, F Boeuf, R Bon, JP Cloarec, D Drouin, A Souifi. (2018). Ultrahigh-Sensitive and CMOS Compatible ISFET Developed in BEOL of Industrial UTBB FDSOI. IEEE Explore, (Article publié).
- Getenet Tesega* Ayele, Stephane Monfray, Frederic Boeuf, Jean-Pierre Cloarec, Serge Ecoffey, Dominique Drouin, Etienne Puyoo, Abdelkader Souif. (2017). Development of ultrasensitive extended-gate Ion-sensitive-field-effect-transistor based on industrial UTBB FDSOI transistor. IEEE Explore, 264-267. (Article publié).
- MN Beattie, Y Bioud*, A Boucherif, D Hobson, R Ares, D Drouin, C Valdivia, K Hinzer. (2017). Electrical Resistivity of Mesoporous and Quasi-Monocrystalline Germanium. MRS Spring Meeting. (Article publié).
- M Labalette*, BenAssayag G, Bonafos C, Pecassou B, Ecoffey S, Souifi A, Drouin D. (2017). Innovative OxRam nanomemories with indium oxide nanocrystals fabricated by ultra low energy ion implantation. European Materials Research Society - EMRS. (Article publié).
- YA Bioud*, A Boucherif, D Drouin, R Arès. (2017). Low cost Ge/Si virtual substrate engineering for III-V multi-junction solar cell. The 13th International Conference on Concentrator Photovoltaics (CPV-13). (Article publié).
- Rigo A, Pinto C, Pouget K, Raho D, Dutoit D, Martinez P.-Y, Doran C, Benini L, Mavroidis I, Marazakis M, Bartsch V, Lonsdale G, Pop A, Goodacre J, Colliot A, Carpenter P, Radojkovi? P, Pleiter D, Drouin D, De Dinechin, B.D. (2017). Paving the way towards a highly energy efficient and highly integrated compute node for the exascale revolution : the ExaNoDe approach. 20th Euromicro Conference on Digital System Design, DSD 2017. 486-493. (Article publié).
- MN Beattie, DG Hobson, CE Valdivia, K Hinzer, YA Bioud*, A Boucherif, D Drouin, R Arès. (2017). Quasi-monocrystalline Geas an interface layer for multi-junction solar cells on Si substrates:Electrical resistivity and device modelling. IEEE Explore, (Article publié).
- Quelennec*, A and Shafique, U and Duchesne, E and Fremont, H and Drouin, D. (2017). Sensitive Humidity Sensor Integrated to a Flip-Chip Package for Moisture Detection in Electronics Package. Minapad. (Article publié).
- Quelennec*, Aurore, Shafique, Umar, Duchesne, Eric, Fremont, Helene and Drouin, Dominique. (2017). Smart Packaging: A Micro-Sensor Array Integrated to a Flip-Chip Package to Investigate the Effect of Humidity in Microelectronics Package. IEEE Explore, 513-519. (Article publié).
- M.Merhej*, D. Drouin, B Salem, S. Ecoffey. (2016). A damascene process for gold micro- and nano- structures. Micro-Nano Engineering. (Article publié).
- G Droulers*, S Ecoffey, M Pioro-Ladrière, D Drouin. (2016). A deep understanding of nanometer scale dielectric junctions for the fabrication of low power nanoelectronic devices. Google books, (Article publié).
- G Droulers*, S Ecoffey, M Pioro-Ladrière, D Drouin. (2016). A manufacturable process for single electron charge detection, a step towards quantum computing. IEEE Explore, (Article publié).
- E. Tetsi*, G. Philippot, I. Bord Majek, C. Aymonier, J. Audet, L. Béchou, D. Drouin. (2016). BaSrTiO nanoparticles dispersion for 3D integration of decoupling capacitors on glass interposer. IEEE Explore, (Article publié).
- B Lee Sang*, S Ecoffey, D Drouin. (2016). CMOS BEOL compatible process for the fabrication of single electron transistors, using TiN/Al2O3/TiN junctions. Micro-Nano Engineering. (Article publié).
- A.Y. Bioud*, A. Boucherif, A. Belarouci, E. Paradis, D. Drouin, R. Ares. (2016). Chemical composition of anodically formed p-typeporous gaas in hf-based electrolyte. Porous Semiconductors - Science and Technology. (Article publié).
- KG. El Hajjam*, MA Bounouar*, D Drouin, F Calmon. (2016). Enhancing Electrical Performances of Metallic DG-SET based Circuits by Tunnel Junction Engineering. 2016 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon. (Article publié).
- Marina Labalette*, Serge Ecoffey, Simon Jeannot, Abdelkader Souifi, Dominique Drouin. (2016). HfOx complementary resistive switches. IEEE Explore, (Article publié).
- A.Y. Bioud*, A. Boucherif, A. Belarouci, E. Paradis, D. Drouin, R. Ares. (2016). Mesoporous germanium by high frequency bipolar electrochemical etching for optical sensor applications. Porous Semiconductors - Science and Technology. (Article publié).
- M. Labalette*, S. Ecoffey, S. Blonkowski, S. Jeannot, A. Souifi, D. Drouin. (2016). Planar HfOx based ReRAM using nanodamascene process. 13th International congress on nanostructured material. (Article publié).
- Drouin, D and Droulers*, G and Labalette*, M and Pioro-Ladriere, M and Souifi, A and Ecoffey, S and others. (2015). 3D microelectronic with BEOL compatible devices. VLSI Test Symposium (VTS), 2015 IEEE 33rd, 1--1. (Article publié).
- Bruno Lee Sang*, Khalil El Hajjam*, Yosri Ayadi*, Serge Ecoffey, Benattou Sadani*, Abdelkader Souifi, Dominique Drouin. (2015). Integration of metallic single electron transistors onCMOS substrate. 17th Canadian Semiconductor Science and Technology Conference. (Article publié).
- Gabriel Droulers*, Serge Ecoffey, Michel Pioro-Ladrière, Dominique Drouin. (2015). Nanodamascene Quantum-Dot Cellular Automata: Design and Fabrication with aprocess. 41st Micro and Nano Engineering. (Article publié).
- Yosri Ayadi*, Lama Rahhal, Bertrand Vilquin, Céline Chevalier, Fabian Ambriz Vargas, Serge Ecoffey, Andreas Ruediger, Andranik Sarkissian, Stéphane Monfray, Jean-Pierre Cloarec, Dominique Drouin , Abdelkader Souifi. (2015). Novel concept of gas sensitivity characterization of materials suited for implementation in FET-based gas sensors. 6th International Conference "Micro&Nano 2015". (Article publié).
- Jean-Philippe Richard*, Richard Beaudry, Yves-Alain Peter, Dominique Drouin. (2015). Plasma Treaments Involved in MEMS Die-Level Release. 17th Canadian Semiconductor Science and Technology Conference. (Article publié).
- M. Ionescu, Y. Ayadi*, C. Côté, S. Ecoffey, R. Nouar, S. Wolfe, D. Drouin, R. Porte, A. Sarkissian. (2015). Plasma and Vacuum Assisted Synthesis of Nanostructured Carbon Allotropes and Applications to Gas Sensors. Graphene Canada. (Article publié).
- PRJ Wilson*, S Landry*, L Caron, E Duchesne, and D Drouin. (2015). Strainand Humidity Response of MWCNT/Polyimide Nanocomposites for Integrated PackageReliability Sensors. 17th Canadian Semiconductor Science and Technology Conference. (Article publié).
- D Drouin, G Droulers*, M Labalette*, BL Sang*, P Harvey-Collard*, JP Richard*, M Pioro-Ladriere, A Souifi, S Monfray, S Ecoffey. (2015). The nanodamasceneprocess: a versatile fabrication technique for nanoelectronic applications. IEEE Nanotechnology, (Article publié).
- M Labalette*, S Ecoffey, D Drouin. (2015). nanodamasceneFabrication of nano planar Resistive RAMdevices using the process. 17th Canadian Semiconductor Science and Technology Conference. (Article publié).
- Droulers*, Gabriel and Ecoffey, Serge and Guilmain*, Marc and Souifi, Abdelkader and Pioro-Ladriere, Michel and Drouin, Dominique. (2014). Damascene planar metal-insulator-metal tunnel junctions. IEEE Explore, 884--887. (Article publié).
- D. Drouin. (2014). Fabrication of Nanoelectronic Device Within the Back End of Line of CMOS Devices. CMOS Emerging Technology. (Article publié).
- BL Sang*, A. Jaouad, M.-J. Gour, S. Ecoffey, M. Darnon, B. Sadani*, A. Souifi, D. Drouin. (2014). Inductively Coupled Plasma Etching of Ultra-Shallow Si3N4 and SiO2 Nanostructures. Micro Nano Enginnering. (Article publié).
- D. Drouin, S. Ecoffey, K. El Hajjam*, B.Lee Sang*, B. Sadani*, P. Harvey-Collard*, L. Valverde*, M. Labalette*, F. Calmon, A. Souifi,. (2014). Integration of nanoelectronic devices within BEOL of CMOS circuit. E-MRS 2014 FALL MEETING. (Article publié).
- B.L. Sang*, M-J. Gour, M. Darnon, A. Jaouad, S. Ecoffey, B. Sadani*, A. Souifi, D. Drouin. (2014). Selective Dry Etching of Titanium Nitride Nanostructures with Chlorine-Based Inductively Coupled Plasma. Micro Nano Engineering. (Article publié).
- Bounouar*, Mohamed Amine and Drouin, Dominique and Calmon, Francis. (2014). Towards nano-computing blocks using room temperature double-gate single electron transistors. IEEE Explore, 325--328. (Article publié).
- D. Drouin. (2013). 3D Integration of Nanoelectronic Devices Above CMOS. Workshop on Frontier Electronic. (Article publié).
- M. Diop*, M.-C. Paquet, D. Drouin. (2013). Advanced Organic Substrate Impact on the Warpage with Variable Frequency Microwave Processing of Underfill. Journal of Microelectronics and Electronic Packaging., (Article publié).
- *Ecoffey S, *Guilmain M, *Droulers G, *Landry S, *Nauenheim C, Ruediger A, Drouin D. (2013). Chemical mechanical planarization of titanium micro and nano-structures. 38th International Micro & Nano Engineering Conference. (Article publié).
- *El Hajjam K, Baboux N, Ecoffey S, Francis L, Souifi A, Calmon F, Drouin D. (2013). Crested barrier tunnel junctions using PEALD Al2O3/HfO2 stackings. Atomic Layer Deposition. (Article publié).
- Chatbouri S, Troudi M, Sghaier N, Kalboussi A, Drouin D, Aimez V, Souifi A. (2013). Effect of illumination on the electron transport mechanisms in Silicon nanocrystal-based nanopixels. IEEE, 1-4. (Article publié).
- Ecoffey S, *Guilmain M, *Nauenheim C, Drouin D. (2013). Nanometer scale titanium structures planarization. 18th International Symposium on Chemical-Mechanical Planarization. (Article publié).
- Ayari-Kanoun A*, Oberson V, Paquin I, Fortin C, Fontaine R, Danovitch D, Drouin D. (2013). Study of influential parameters for Lead-Free Flip chip solder joint cracking. European Microelectronics and Packaging Conference. (Article publié).
- Souifi A, *Jouvet N, Ecoffey S, Beaumont A, Calmon F, Monfray S, Drouin D. (2012). 3D integration of low power nanoelectronic devices above CMOS circuits. Nanoscale Science and Technology (NS&T’12). (Article publié).
- *Droulers G, Ecoffey S, Pioro-Ladrière M, Drouin D. (2012). Conception and fabrication of Quantum Cellular Automata based on a single electron transistor process. NanoQuébec 2012 Conference “Nanotechnologies: sources of innovation and competitiveness”. (Article publié).
- *El Hajjam K, *Bounouar MA, Baboux N, *Jouvet N, *Guilmain M, *Ecoffey S, Puyoo E, Le Berre M, *Nauenheim C, Monfray S, Souifi A, Drouin S, Calmon F. (2012). Développement d’un Filtre de Courant Thermoïonique pour l’Augmentation de la Température de Fonctionnement du SET. Journées Nanoélectronique du Club EEA. (Article publié).
- *Jouvet N, *Bounouar MA, Ecoffey S, *Nauenheim C, Beaumont A, Monfray S, Ruediger A, Calmon F, Souifi A, Drouin D. (2012). Développements Récents de l’Intégration 3D de SET Métalliques sur CMOS pour une Application Mémoire. NanoQuébec 2012 Conference “Nanotechnologies: sources of innovation and competitiveness”. (Article publié).
- *Harvey-Collard P, *Richard JP, *Nauenheim C, Ruediger A, Drouin D, Pioro-Ladrière M. (2012). Fabrication of Silicon Quantum Dots for Quantum Information. NanoQuébec 2012 Conference “Nanotechnologies: sources of innovation and competitiveness”. (Article publié).
- D. Drouin. (2012). Fabrication of nanoelectronic devices above CMOS. 38th International Micro & Nano Engineering Conference. (Article publié).
- *Nauenheim C, Moretti-Poisson M, Ecoffey S, *Lecestre A, Ruediger A, Drouin D. (2012). Fast Non-Volatile Memristive Memory on CMOS. NanoQuébec 2012 Conference “Nanotechnologies: sources of innovation and competitiveness”. (Article publié).
- *Harvey-Collard P, Jaouad A, Drouin D, Pioro-Ladrière M. (2012). ICP etching of amorphous silicon nanostructures over topography using C4F8/SF6 chemistry. 8th International Micro & Nano Engineering Conference. (Article publié).
- Solanki A, Pauc* N, Gentile P, Calvo V, Rosaz G, Salem B, Aimez V, Drouin D, Magnea N. (2012). Influence of the Dielectric Environment on the Absorption Properties of Single Silicon Nanowires. EMRS Processging, (Article publié).
- Souifi A, Drouin D. (2012). Integration of nanoelectronic's functions in cmos back end of line. Material for Advanced Metallization, (Article publié).
- *Bounouar MA, Beaumont A, Calmon F, Drouin D. (2012). Metallic SET based Logic Cells: Evaluation & Comparison of Power Concumption with their CMOS Couterparts. NanoQuébec 2012 Conference “Nanotechnologies: sources of innovation and competitiveness”. (Article publié).
- *Bounouar MA, Beaumont A, Calmon F, Drouin D. (2012). Nanoelectronic Logic Cells Based on Metallic Single Electron Transistors. Ultimate Integration on Silicon (ULIS), 2012 13th International Conference on, 156-160. (Article publié).
- *Guilmain M, Xuan W, Morissette JF, Ecoffey S, Beaumont A, Drouin D. (2012). Non-volatile single electron memory using a floating nanogate approach. NanoQuébec 2012 Conference “Nanotechnologies: sources of innovation and competitiveness”. (Article publié).
- D. Drouin. (2012). Room-Temperature Single Electron Transistors and Their Potential Integration on CMOS. CMOS Emerging Technology. (Article publié).
- *Bounouar MA, Beaumont A, *El Hajjam K Calmon F, Drouin D. (2012). Room Temperature Double Gate Single Electron Transistor based Standard Cell Library. Nanoscale Architectures (NANOARCH), 2012 IEEE/ACM International Symposium on, (Article publié).
- *Griveau D, Ecoffey S, Parekh RM, Bounouar MA, Calmon F, Beauvais J, Drouin D. (2012). Single Electron CMOS-Like One Bit Full Adder. NanoQuébec 2012 Conference “Nanotechnologies: sources of innovation and competitiveness”. (Article publié).
- *Griveau D, Ecoffey S, *Parekh RM, *Bounouar MA, Calmon F, Beauvais J, Drouin D. (2012). Single Electron CMOS-Like One Bit Full Adder. Ultimate Integration on Silicon (ULIS), 2012 13th International Conference on, 77-80. (Article publié).
- Pauc* N, Solanki A, Gentile P, Calvo V, Rosaz G, Salem B, Aimez V, Drouin D, Magnea N. (2012). Size and Dielectric Coating Induced Optical Absorption Enhancement in Silicon Nanowires. International Conference on Superlatices, Nanostructures, and Nanodevices. (Article publié).
- Nauenheim* C, Drouin D, Waser R, Ruediger A. (2012). Time Voltage Dependency in Resistance Switching TiO2. MRS Proceedings, mrss12-1430-e09-03. (Article publié).
- Ecoffey S, Morissette JF, *Guilmain M, *Nauenheim C, Drouin D. (2012). Ultrathin Titanium Passive Devices Fabrication. NanoQuébec 2012 Conference “Nanotechnologies: sources of innovation and competitiveness”. (Article publié).
- *Demers H, *Poirier-Demers N, de Jonge N, Drouin D. (2011). 3D Electron Microscopy Simulation with the CASINO Monte Carlo Software,. Microscopy and Microanalysis, (Article publié).
- *Poirier-Demers N, *Demers H, Drouin D, de Jonge N. (2011). Deconvolution of Simulated STEM Images of Nanoparticles in Micrometers-Thick Substrates. Microscopy and Microanalysis, (Article publié).
- *Droulers G, Blais S, Morissette JF, Beaumont A, Pioro-Ladriere M. and Drouin D. (2011). Ellipsometric and X-Ray Photoelectron Spectroscopy Characterization of Titanium Dioxide Thin Films Created by Oxygen Plasma. Material Research Society. (Article publié).
- Solanki A, Pauc N, Gentile P, Calvo V, Rosaz G, Salem B, Aimez V, Drouin D, Magnea N. (2011). Influence of the dielectric environment in the absorption properties of single silicon nanowires. GDR Nanofils, Nanotubes, Semiconducteurs. (Article publié).
- *Demers H, Drouin D, de Jonge N. (2011). STEM Lateral Electron Probe Profile Calculated by Monte Carlo Simulations in Micrometers-Thick Substrates. Microscopy and Microanalysis, (Article publié).
- *Bounouar MA, Calmon F, Beaumont A, *Guilmain M, Xuan W, *Ecoffey S, Drouin D. (2011). Single Electron Transistor Analytical Model for Hybrid Circuit Design. New Circuits and Systems Conference (NEWCAS), 2011 IEEE 9th International, 506 - 509. (Article publié).
- *Ecoffey S, Morissette JF, *Guilmain M, *Bourque F, *Pont J, *Sang BL, Drouin D. (2011). Top-down approaches for the fabrication of titanium nanostructures. Proceeding of the 55th Int. conf on EIPBN, (Article publié).
- *Ecoffey S, Morissette JF, *Jedidi N, *Guilmain M, *Nauenheim C, Drouin D. (2011). Ultrathin Titanium Passive Devices Fabrication. Nanotechnology (IEEE-NANO), 2011 11th IEEE Conference on, 1689 - 1692. (Article publié).
- Sieutat C, Leclercq JL, Letartre X, Callard S, Gendry M, Grenet G, Naji K, Regreny P, Rojo-Romeo P, Viktorovitch P, Beaudin G, Cloutier M, Drouin D, Aimez V. (2010). 3D harnessing of light with photon cage. SPIE Photonics Europe. (Article publié).
- *Demers H, *Poirier-Demers N, de Jonge N, Drouin D. (2010). CASINO Monte Carlo Simulations of Scanning Transmission Electron Microscopy. Microscopy and Microanalysis, 258-259. (Article publié).
- *Dupuy E, Pauc N, Morris D, Gendry M, Drouin D. (2010). Carrier Capture Length of Single Self-Assembled Quantum Dots : Measurement and Simulation by low-voltage SEM-CL and CASINO Software. 10th International Workshop on Beam Injection Assessment of Microstructures in Semiconductors. (Article publié).
- Mendez M, Marsal LF, Cesteros Y, Carvajal, JJ, Martinez-Ferrero E, Giguère A, Drouin D, Formentin P, Pallarès J, Salagre P, Aguiló M, Diaz F. (2010). Eu3+:La2O3 nanoparticles dispersed into P3HT as a down converter material for exploiting the solar spectrum. Conferencia Espanola de Nanofotónica (CEN-2010). (Article publié).
- Mendez M, Cesteros Y, Marsal LF, Martinez-Ferrero E, Giguère A, Drouin D, Salagre P, Formentin P, Pallarès J, Aguiló M, Diaz F, Carvajal JJ. (2010). Eu3+ doped La2O3 nanoparticles as a down converter material to improve the solar spectrum energy. European Materials Research Society 2010. (Article publié).
- Carvajal JJ, Mendez M, Cesteros Y, Marsal LF, Martinez-Ferrero E, Giguère A, Drouin D, Salagre P, Formentin P, Pallarès J, Aguiló M, Diaz F. (2010). Exploring the possibilities of Eu3+:La2O3 nanoparticles as an approach for down conversion processes in solar energy systems. SPIE Photonics Europe. (Article publié).
- *Dupuy E, Pauc N, Morris D, Gendry M, Drouin D. (2010). Low-Voltage Cathodoluminescence as a High Spatial Resolution Technique for Nanostructure Characterization. Microscopy and Microanalysis, 820-821. (Article publié).
- *Guilmain M, *Ecoffey S, Jaouad A, Drouin D. (2010). Nanoscale ICP etching of SiO2. 36th International Conference on Micro & Nano Engineering. (Article publié).
- Carvajal JJ, Mendez M, Cesteros Y, Marsal LF, Martinez-Ferrero E, Giguère A, Drouin D, Salagre P, Formentin P, Pallarès J, Aguiló M, Diaz F. (2010). Photoluminescence and cathodoluminescence of Eu : La2O3 nanoparticles synthesized by several methods. VIème rencontre franco-espagnole sur la chimie et la physique de l'état solide,. (Article publié).
- de Jonge DN, Ramachandra R, Northan BM, *Poirier-Demers N, Drouin D. (2010). Three-Dimensional Aberration-Corrected Scanning Transmission Electron Microscopy of Biological Specimens. Microscopy and Microanalysis, 328-329. (Article publié).
- Hovington P, T.-Pinard P, Lagacé M, Thibault D, Rodrigue L, Gauvin R, Drouin D. (2009). Evaluation of Strategies to Increase the Spatial Resolution of X-Ray-Mapping in the FESEM of Low Concentration in Sub-Micron microstructures. Microscopy and Microanalysis, 480. (Article publié).
- *Dupuy E, *Pauc N, Drouin D, Xu G, Gendry M, Morris D. (2009). High resolution imaging of InAs/InP single quantum dots by low-voltage cathodoluminescence. 2009 International Conference on Indium Phosphide & Related Materials. (Article publié).
- Phillips, MR, Drouin D, Moody SJ, Ton-That C. (2009). Imaging Fundamental Electronic Excitations at High Spatial Resolution Using Scanning Cathodoluminescence Microscopy. Microscopy and Microanalysis, 670. (Article publié).
- *Ayari-Kanoun A, Drouin D, Beauvais J, Lysenko V, Souifi A. (2009). Localized Silicon Nanocrystals on Nanopatterned Si3N4 Substrate. 2009 Materials Research Society Fall Meeting. (Article publié).
- Mendez M, Aguiló M, Diaz F, Carvajal JJ, Giguère A, Drouin D, Martinez-Ferrero E, Salagre P, Cesteros Y, Palacios R, Pallarès J, Marsal LF. (2009). New approaches for the synthesis of Eu3+ : La2O3nanoparticles and their spectroscopic characterization. The 2nd International Conference on Physics of Optical Materials and Devices ICOM2009. (Article publié).
- Mendez M, Carvajal JJ, Diaz F, Aguiló M, Giguère A, Drouin D, Martinez-Ferrero E, Salagre P, Cesteros Y, Palacios R, Pallarès J, Marsal LF. (2009). Synthesis and characterization of europium-doped La2O3 nanoparticles. TNT 2009 Trends in Nanotechnology. (Article publié).
- *Eugene L, Souifi A, *Incarbone L, Troudi M, Aimez V, Drouin D. (2009). Visible-range photocurrent of silicon nanocrystals in a MOS structure. NGC 2009 & CSTC 2009 Conference. (Article publié).
- Drouin D, *Pauc N, Phillips MR, *Poissant P, Delample V, Aimez V, Beauvais J. (2008). Characterization of nanodevices and materials using advanced SEM techniques. Microscopical Society of Canada (SMC-MSC) 2008 Annual Meeting. (Article publié).
- Drouin D. (2008). Characterization of semiconductor materials using Cathodoluminescence and Monte Carlo simulation. in 20th Australian Conference on Microscopy and Microanalysis and the 4th Congress of the International Union of Microbeam Analysis Societies. (Article publié).
- Drouin D, *Demers NP, Philips MR. (2008). Development of a Simulating Tool for Cathodoluminescence Imaging of Semiconductors. 9th International Workshop on Beam Injection Assessment of Microstructures in Semiconductors. (Article publié).
- Sahmuganathan V, Mi Z, Drouin D. (2008). Emission characteristics of InGaAs/GaAs quantum dot microtube ring resonators. LEOS 2008 - 21st Annual Meeting of the IEEE Lasers and Electro-Optics Society. (Article publié).
- *Dupuy E, Xu G, Regreny P, Robach Y, Gendry M, Chauvin N, Bru-Chevallier C, Patriarche G, Morris D, Pauc N, Aimez V, Drouin D. (2008). Influence of surface reconstructions on the shape of InAs quantum dots grown on InP. IPRM 2008 - 20th International Conference. (Article publié).
- *Dupuy E, *Pauc N, Aimez V, Gendry M, Morris D, Drouin D. (2008). Low-Voltage Cathodoluminescence Microscopy and Spectroscopy of Diluted InAs/InP Self-Assembled Quantum Dots. IUMRS-ICEM08 | COMMAD 2008. (Article publié).
- Phillips MR, Drouin D, Coleman VA, Bradby JE, Jagadish C. (2008). Low voltage CL study of exciton transport in ZnO single crystals. 20th Australian Conference on Microscopy and Microanalysis and the 4th Congress of the International Union of Microbeam Analysis Societies. (Article publié).
- Drouin D,Carvajal JJ, Aguiló M, Beaumont A, Díaz F, Rojo JC. (2008). Nanoporous GaN p-n junctions fabricated by a simple chemical vapor deposition approach. Material Research Society. (Article publié).
- Phillips MR, Ton-That C, Drouin D. (2008). Probing the Cathodoluminescence Properties of the ZnO:Zn Surface. IUMRS-ICEM08 | COMMAD 2008. (Article publié).
- McBean KE, Phillips MR, Drouin D. (2008). The Affect of the Purity of Reactants and Post-Processing Techniques on the Cathodoluminescence of ZnO Nano-Powders. IUMRS-ICEM08 | COMMAD 2008. (Article publié).
- Philips MR, Ton-That C, Drouin D. (2008). Ultra-Low Voltage Cathodoluminescence Study of the Green Emission in ZnO:Zn. 9th International Workshop on Beam Injection Assessment of Microstructures in Semiconductors. (Article publié).
- Delample, V., Poissant, P., Baron, T., Decossas, S., Souifi, A., Drouin, D. et Beauvais, J. (2007). Fabrication and characterization of isolated single Silicon and Germanium nanocrystals using AFM nanomanipulation and sub-10nm gap electrodes. In 13th Canadian Semiconductor Technology Conference (CSTC-CCTS 2007). (Article publié).
- L. Eugène, N. Pauc, T. Baron, A. Souifi, V. Aimez, D. Drouin. (2007). Fabrication and electrical characterization of nanopillars containing silicon nanocrystals. In 13th Canadian Semiconductor Technology Conference (CSTC-CCTS 2007). (Article publié).
- *Eugene L, *Pauc N, Baron T, Souifi A, Aimez A, Drouin D. (2007). Fabrication and electrical insulation of nanopillars incorporating silicon nanocrystals for optoelectronic applications. Material Research Society. (Article publié).
- J.J. Carvajal, D. Drouin, Y. Gong, I. Kuskovsky. J.C. Rojo. (2007). Integration of nanoporous InGaN structures on Silicon technology. The 15th International Conference on Crystal Growth. (Article publié).
- E. Dupuy, N. Pauc, N. Chauvin, G. Patriarche, P. Regreny, G. Saint Girons, D. Drouin, V. Aimez, C. Bru-Chevallier, M. Gendry, D. Morris. (2007). Luminescence properties of single InAs/InP(001) quantum dots grown by solid source molecular beam epitaxy. In 13th Canadian Semiconductor Technology Conference (CSTC-CCTS 2007). (Article publié).
- M. R. Phillips, D. Drouin. (2007). Nanoscale Characterisation of Exciton and Carrier Diffusion in Wide Band Gap Semiconductors using Low Voltage Cathodoluminescence Microscopy and Spectroscopy. European Material Research Society. (Article publié).
- C. Dubuc, J. Beauvais and D. Drouin. (2007). Nanowire based single-electron transistor with wide operating temperature range. In 13th Canadian Semiconductor Technology Conference (CSTC-CCTS 2007). (Article publié).
- *Beaumont A, *Dubuc C, Drouin D, Beauvais J. (2007). Titanium Nanowires Interspersed With Tens of Zeptofarad Tunnel Junctions for High Density Single Electron Circuit. Material Research Society. (Article publié).
- A. Beaumont, C. Dubuc, D. Drouin, J. Beauvais. (2007). Towards tens of zeptofarad tunnel junctions for single-electron devices integration. 13th Canadian Semiconductor Technology Conference (CSTC-CCTS 2007). (Article publié).
Propriétés intellectuelles
Brevets
- E Duchesne, D Drouin, H Fremont, S Landry*, A Quelennec, U. Shafique*, P Wilson. (2020). Carbon Nanotube-based multi-sensor. 10564047. États-Unis. (Délivré).
- Duchesne E, Drouin D, Frémont H, Landry S, Quelennec AF, Shafique U, Wilson PR. (2020). Carbon nanotube-based multi-sensor. 10739209. États-Unis. (Délivré).
- (2005). Fabrication of Silicide Structures by X-ray/EUV projection lithography. 6,897,140. États-Unis. (Délivré).
- (2005). Plasma polymerized electron beam resist. 6,855,646. États-Unis. (Délivré).
- (2004). Method of producing an etch-resistant polymer structure using electron beam lithography. 6,777,167. États-Unis. (Délivré).
- (2003). Method for using sub-micron silicide structures formed by an electron beam lithography process for the fabrication of masks for extreme ultra-violet and deep ultra-violet projection lithography. États-Unis. (Délivré).
- (2001). Fabrication of sub-micron etch-resistant metal/semiconductor structures using resistless electron beam lithography. 6,261,938. États-Unis. (Délivré).
- (1999). Fabrication of sub-micron silicide structures on silicon using resistless electron beam lithography. Canada. (Délivré).
- A El Amrani, É Paradis, D Danovitch, D Drouin. Heterogeneous solder bump structure. Canada. (En instance).
Autres contributions
Cours enseignés
- Technologies et procédés de micro et nanofabrication. GEI729. Université de Sherbrooke. Canada. (3CR).
Activités de collaboration internationale
- Philippe Galy (ST Microelectronics). France.
- Stéphane Monfray (ST Microelectronics) France. France.
- Hélène Frémont (IMS Bordeaux). France.
- Emanuel Loerscher (IBM Research Zurich). Suisse.
- Jean-Pierre Cloarec (Ecole Centrale Lyon). France.
- Abdelakder Souifi (INSA-Lyon) France. France.
- Pierre-Yves Martinez (CEA LETI). France.
- Laurent Bechou (IMS Bordeaux). France.
- Thomas Brunschwiler (IBM zurich). Suisse.
- Bassem Salem (LTM Grenoble). France.
- Gerard Benassayag (CEMES/CNRS) France. France.
- Laurent Francis (Universite Catholique de Louvain) Belgium. Belgique.
- Francis Calmon (INSA Lyon). France.
- Eric Silver (Harvard-Smithsonian Center For Astrophysics) and Jeff Beeman (Berkely). États-Unis.
- Nield de Jonge (Vanderbilt University). États-Unis.
Présentations
- G. Droulers*, M. Labalette*, M. Pioro-Ladrière, S. Ecoffey. (2015). Monolitic 3D Integration of Nanoelectronics Device. 9th NAMIS International Summer School - Nano and Micro Systems. Montreal, Canada
- G. Droulers*, M. Labalette*, B.L. Sang*, Y. Ayadi*, A. Souifi, M. Piroro-Ladriere, S. Ecoffey. (2015). Nanofabrication et integration 3D: La procédé Nanodamascene. Entretiens Jacques Cartier - Objets connectés. Lyon, France
- D. Danovitch, J. Sylvestre. (2014). Collaboration Perspectives<?>Advanced Packaging and Embedded Systems. CMC/C2MI/ITAC joint Symposium. Ottawa, Canada
- (2013). Dispositifs Nanoelectroniques pour une Integration 3D sur Circuit CMOS. Nanosciences fondation. Grenoble, France
- D. Drouin, S. Ecoffe, C. Nauenheim*, M. Guilmain*, G. Droulers*, D. Griveau*, M. A. Bounouar*, N. Jouvet*, A. Ruediger, F. Calmon, S. Monfray, A. Souifi. (2012). Room-Temperature Single Electron Transistors and Their Potential Integration on CMOS. Summer School Regroupement Québécois Matériaux de Pointes. Orford, Canada
- D. Drouin, M. A. Bounouar*, G. Droulers*, M. Guilmain*, D. Griveau*, N. Jouvet*, J.P. Richard*, S. Ecoffey*, A. Lecestres*, C. Nauenheim*, A. Ruediger, S. Monfray, S. Charlebois, M. Pioro-Ladriere, F. (2012). Vers les nanodispositifs ultra-basse consommation sur CMOS. Entretiens Jacques-Cartier. Lyon, France
- M. Guilmain, R. Parekh, M. Amine Bounouar, S. Ecoffey, F. Calmon, D. Drouin. (2011). Intégration de dispositifs nanoélectroniques innovants sur circuits CMOS. Winter School on Design Technologies for Heterogeneous Embedded Systems. Quebec, Canada
- Drouin D, Albertini D, Baboux N, Beauvais J, Beaumont A, Bourbonnais B, Calmon F, Charlebois S, Chaker M, Ecoffey S, Gautier B, Guilmain M, Morissette JF, Parekh R, Souifi A, Xuan W. (2009). Integration of monoelectronic component with CMOS technology. 22e Entretiens » du Centre Jacques Cartier. Lyon, France
- Drouin D, Albertini D, Baboux N, Beauvais J, Beaumont A, Bourbonnais B, Calmon F, Charlebois S, Chaker M, Ecoffey S, Gautier B, Guilmain M, Morissette JF, Parekh R, Souifi A, Xuan W. (2009). Nanofabrication de transistors monoélectropnique intégrés à la technologie CMPS. Grande conerence du regroupement québécois sur les matériaux de pointes. Sherbrooke, Canada