DUV Flooder

Description

Exposition DUV device (distant ultraviolet) without a photolithographic mask alignment system for illumination on all substrates

Manufacturer and model

OAI- Optical Associates Inc.- OAI 2000W UV-Flooder

Technical specifications
  • UV light source 2000W with DUV wavelength 250nm
  • Substrate max diameter : 4 in
Examples of available processes
  • Hybrid process: Step of PMMA resin expositon (electrosensitive resin, but also photosensitive to DUV, not UV) masked by photoresist in a lithographic process combining photolitho and electrolitho for greater efficiency
  • Other DUV Exhibition

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