Thin layers deposition.
Manufacturer and model
Edwards - Auto 306
- Carousel with 4 crucibles (materials available: Al, AlSi, Au, Cr, Ge, Ni, Permalloy, Si, Ti) making it possible to realize multilayer deposits without having to break the vacuum
- Rotary sample holder
- Thickness monitor with 0.1 nm resolution
- Uniformity of the deposit: better than 5% on 3 inches for Al
- Possibility of cleaning the in-situ substrate with argon plasma
Examples of available processes
- Surface metallizations
- Deposition of metallic multilayers for the production of ohmic contacts on semiconductors and heterostructures
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