Vacuum coater Edwards

Description

Thin layers deposition.

Manufacturer and model

Edwards - Auto 306

Technical specifications
  • Carousel with 4 crucibles (materials available: Al, AlSi, Au, Cr, Ge, Ni, Permalloy, Si, Ti) making it possible to realize multilayer deposits without having to break the vacuum
  • Rotary sample holder
  • Thickness monitor with 0.1 nm resolution
  • Uniformity of the deposit: better than 5% on 3 inches for Al
  • Possibility of cleaning the in-situ substrate with argon plasma
Examples of available processes
  • Surface metallizations
  • Deposition of metallic multilayers for the production of ohmic contacts on semiconductors and heterostructures

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