Sputter deposition system SPT320


Thin layers deposition.

Manufacturer and model

Plasmionique - SPT320

Technical specifications
  • 3-magnetron system (available materials: Ag, Al, AlN, Al₂O₃, AlSiCu, Cr, Cu, Hf, HfO₂, In₂O₃, ITO, Mo, Nb, Ni, NiCr, Si, SiO₂, Ta, Ti, W) for making multilayer deposits without having to break the vacuum
  • Rotary sample holder
Examples of available processes
  • Surface metallizations
  • Deposition of metallic multilayers for the production of ohmic contacts on semiconductors and heterostructures

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