Electrical measurements Station in clean room

Description

A station that includes a manual probe station with 4 manipulators, two I-V parametric analyzers, a gain-phase impedance analyzer and a measuring instrument with a 4-probe sensor for resistivity measurements

Manual probe station

Equipment role

Electrical measurements under probes.

Manufacturer

Wentworth

Model

MP400

Technical specification

  • For substrates up to 4 in. of diameter
  • 4 magnetic-based manipulators
  • Controls for the positioning of the needles (probes) according to 3 axes
  • Optical microscope with 3 lenses (2X, 4X and 8X) and 10X eyepieces
  • Zoom 1X to 2X
  • Live image captured by analogue camera with on-screen display

Examples of available processes

Interconnections of manipulators with sources and measuring devices for I-V, C-V, I-t, V-t, 4-probes (resistance) measurements, etc.

Gain-phase impedance analyser

Equipment role

Measurements of impedance and particularly capacitance vs voltage (C-V) and Conductance vs frequency (G-w)

Manufacturer

Schlumberger

Model

SI 1260

Technical specification

  • Frequency: 10uHz to 32MHz
  • Amplitude AC: 0 to 3V (<10MHz), 0 to 1V (> = 10MHz)
  • DC polarization: +/- 40.95Vdc +/- 100mA
  • Scanning: Frequency, amplitude, polarization
  • Stand-alone use
  • Remote control with computer-generated data acquisition and processing
  • Connection to the probe station's manipulators
  • Possible connection to mercury sensor or other test station

Example of available processes

  • Characterization of devices by evaluation of the concentration of carriers in the semiconductor substrate using C-V measurements on MOS, MIS, MIM, Schottky junctions or inverse polarized diodes, etc.
  • Measures G-w

Keithley parametric analyser

Equipment role

Electrical measurement (I-V), (I-t), (V-t)

Manufacturer

Keithley

Model

S4200

Technical specification

  • 4 SMUs (source and measuring units) without preamplifiers
  • Maximum source current of 100mA per EMS
  • Maximum source voltage of 20V without interlock, possibility of 200V with interlock.
  • Measurement resolution of 1pA in current and 1uV in the finest scales.
  • Software for instrument control and acquisition and processing of data on the device.

Exxampes of available processes

  • Characterization of MOS transistors (Id-Vds, Id-Vgs, etc.) and other devices
  • Nanowire Resistance Measurements
  • Checking ohmic contacts after annealing
  • Diode threshold voltage measurements
  • Evaluation of leakage current of capacitor grids

HP parametric analyser

Equipment role

Electrical measurements, currently dedicated for resistivity measurements with 4-probe sensor instrument

Manufacturer

Hewlett Packard

Model

HP4145A

Technical specification

  • 4 SMUs, plus 2 voltage sources and 2 voltmeters
  • Maximum source current of 100mA per SMU
  • Maximum voltage of 42V maximum without interlock and 100V with interlock and earthed
  • Maximum resolution of 1pA and 1mV

Examples of available processes

  • Measurements I-V, I-t, V-t, as well as 4-probe resistance measurement when connected to a 4-point probe

4-points probe

Equipment role

Surface resistivity measurement

Manufacturer

Signatone

Model

n.d. (4 points probe)

Technical specification

Substrates up to 3 "diameter

Probe head with 4 tungsten carbide tips, arranged in line and at 50mils distance, with spring force of 85g

Examples of available processes

  • Resistance measurement of substrates or semiconductor samples
  • Resistance measurement of semiconductor or metallic layers