Fogale optical profilometer

Equipment role

Low coherence interference surface profilometry.




Photomap 3D

Technical specification

  • Available microscope lenses: 5x, 20x and 50x
  • Vertical resolution of 1nm verified (0.1nm reachable)
  • Maximum measurement height of 500 μm.
  • Lateral resolution of 1.8 μm, 0.42 μm or 0.17 μm (5x, 20x, 50x)
  • Field of view of the camera of 1.2mm x 1mm, 300 μm x 200 μm or 125 μm x 95 μm (5x, 20x, 50x)
  • 200 mm tray traveling over 50mm
  • Maximum clearance between tray and 200mm microscope lens