Low coherence interference surface profilometry.
- Available microscope lenses: 5x, 20x and 50x
- Vertical resolution of 1nm verified (0.1nm reachable)
- Maximum measurement height of 500 μm.
- Lateral resolution of 1.8 μm, 0.42 μm or 0.17 μm (5x, 20x, 50x)
- Field of view of the camera of 1.2mm x 1mm, 300 μm x 200 μm or 125 μm x 95 μm (5x, 20x, 50x)
- 200 mm tray traveling over 50mm
- Maximum clearance between tray and 200mm microscope lens