Filmetrics

Description

The Filmetrics F10-RT is used to measure the reflectance and transmittance of thin films.

With the appropriate software options, film thickness and refractive index can also be measured.

Measured films must be optically smooth and flat to be measured. Very rough or metallic films cannot therefore be measured.

Manufacturer and model

Filmetrics F-10-RT

Technical specifications
  • Halogen tungsten light source on the range of 375nm-3000nm
  • Measurement of the intensity of the light reflected by a spectrometer at 1024 different wavelengths
  • Photodiode array to integrate the current on the 1024 pixels
  • Adjustable integration time to optimize the reading of measurement data
Examples of available processes

The Filmetrics F10-RT is used to measure the reflectance and transmittance of thin films. With the proper software options film thickness and refractive index can also be measured. Measured films must be optically smooth and flat in order to be measured. Commonly measured films include semiconductor process films such as oxides, nitrides, resists, and polysilicon, optical coatings such as hardness and antireflection coatings, flat panel display films such as polyimides, resist, and cell gaps. Films that cannot be measured include very rough films and metal films.

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