Contactless conductivity probe

Equipement's role

Contactless electrical conductivity measurements

Manufacturer & Model

Semilab LEI88

Technical specifications

  • Non-destructive
  • Fast, accurate measurements of sheet conductance / sheet resistance
  • Nominal sample thickness range of 450 to 800 microns
  • Nominal coil gap (>/= 0.35”/0.899 mm)
  • Coil size: 0.56” (14mm)
  • Max. Wafer size: 6” (150mm)
  • Hi-range: sheet resistance 16 - 3,200 Ω/sq. 

Available processes

Conductivity measurement of wafers or thin layers