Vacuum coater Edwards

Equipment role

Thin layers deposition.




Auto 306

Technical specification

  • Carousel with 4 crucibles (materials available: Al, AlSi, Au, Cr, Ge, Ni, Permalloy, Si, Ti) making it possible to realize multilayer deposits without having to break the vacuum
  • Rotary sample holder
  • Thickness monitor with 0.1 nm resolution
  • Uniformity of the deposit: better than 5% on 3 inches for Al
  • Possibility of cleaning the in-situ substrate with argon plasma

Examples of available processes

  • Surface metallizations
  • Deposition of metallic multilayers for the production of ohmic contacts on semiconductors and heterostructures