Sputter deposition system SPT320

Equipment role

Thin layers deposition.

Manufacturer

Plasmionique

Model

SPT320

Technical specification

  • 3-magnetron system (available materials: Ag, Al, AlN, Al₂O₃, AlSiCu, Cr, Cu, Hf, HfO₂, In₂O₃, ITO, Mo, Nb, Ni, NiCr, Si, SiO₂, Ta, Ti, W) for making multilayer deposits without having to break the vacuum
  • Rotary sample holder

Examples of available processes

  • Surface metallizations
  • Deposition of metallic multilayers for the production of ohmic contacts on semiconductors and heterostructures